Inventor

DEL PUERTO SANTIAGO E

US22 patents

⚠️ This page may combine multiple inventors who share the name “DEL PUERTO SANTIAGO E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DEL PUERTO SANTIAGO E

ASML HOLDING NV

System and method of measuring thermal expansion

Wafer handling system for use in lithography patterning

System and method for reticle protection and transport

System and method for reticle protection and transport

Lithographic apparatus and method

Vacuum pre-loaded pneumatic bearing with onboard vacuum generator

Wafer handling method for use in lithography patterning

Foam core chuck for the scanning stage of a lithography system

Compensation techniques for fluid and magnetic bearings

Resonant scanning mirror

Bearing arrangement for reaction mass in a controlled environment

Wafer handling method for use in lithography patterning

Bearing arrangement for reaction mass in a controlled environment

Determining position and curvature information directly from a surface of a patterning device

IBM

Dry interface thermal chuck temperature control system for semiconductor wafer testing

Liquid film interface cooling chuck for semiconductor wafer processing

Liquid film interface cooling system for semiconductor wafer processing

DEL PUERTO SANTIAGO E

Optically compensated unidirectional reticle bender

Reticle support that reduces reticle slippage

SILICON VALLEY GROUP

Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography

FARNSWORTH WINDY LYNN

Lithographic apparatus, projection system and damper for use in a lithographic apparatus and device manufacturing method

PARIZA DRAGOS

Pneumatic bearing with bonded polymer film wear surface and production method thereof