Inventor
LUTTER STEFAN
CH6 patents
⚠️ This page may combine multiple inventors who share the name “LUTTER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOWORLD AG
4 patentsUS6780767B2Aug 24, 2004
Semiconductor component in a wafer assembly
NANOWORLD AG9 citations68
US6979407B2Dec 27, 2005
Process for producing an SPM sensor
NANOWORLD AG3 citations57
US6958124B2Oct 25, 2005
SPM sensor and process for producing it
NANOWORLD AG3 citations57
US6953751B2Oct 11, 2005
Micro device and process for producing it
NANOWORLD AG0 citations42