Inventor
KIM DEOK-YONG
KR13 patents
⚠️ This page may combine multiple inventors who share the name “KIM DEOK-YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
10 patentsUS6525318B1Feb 25, 2003
Methods of inspecting integrated circuit substrates using electron beams
SAMSUNG ELECTRONICS CO LTD19 citations86
US7200258B2Apr 3, 2007
Method for selecting reference images, method and apparatus for inspecting patterns on wafers, and method for dividing a wafer into application regions
SAMSUNG ELECTRONICS CO LTD7 citations72
US6545491B2Apr 8, 2003
Apparatus for detecting defects in semiconductor devices and methods of using the same
SAMSUNG ELECTRONICS CO LTD11 citations70
US9322771B2Apr 26, 2016
Apparatus and method for monitoring semiconductor fabrication processes using polarized light
SAMSUNG ELECTRONICS CO LTD4 citations68
US6995074B2Feb 7, 2006
Method for manufacturing a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD6 citations61
US7245365B2Jul 17, 2007
Apparatus and method for detecting particles on an object
SAMSUNG ELECTRONICS CO LTD3 citations53
US7084969B2Aug 1, 2006
Method of optimizing focus of optical inspection apparatus and method and apparatus of detecting defects using the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US9165354B2Oct 20, 2015
Method of analyzing photolithography processes
SAMSUNG ELECTRONICS CO LTD0 citations48
US9551653B2Jan 24, 2017
Methods for monitoring semiconductor fabrication processes using polarized light
SAMSUNG ELECTRONICS CO LTD0 citations47
US6100102AAug 8, 2000
Method of in-line monitoring for shallow pit on semiconductor substrate
SAMSUNG ELECTRONICS CO LTD0 citations44