Inventor
SENZAKI SHIGERU
JP7 patents
Patents
7 patentsUS6899786B2May 31, 2005
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
TOKYO ELECTRON LTD52 citations95
US10199246B2Feb 5, 2019
Temperature control mechanism, temperature control method and substrate processing apparatus
TOKYO ELECTRON LTD44 citations93
US7481903B2Jan 27, 2009
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism
TOKYO ELECTRON LTD11 citations83
US9613837B2Apr 4, 2017
Substrate processing apparatus and maintenance method thereof
TOKYO ELECTRON LTD4 citations71
US10069443B2Sep 4, 2018
Dechuck control method and plasma processing apparatus
TOKYO ELECTRON LTD4 citations68
US10276405B2Apr 30, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations66
US9818582B2Nov 14, 2017
Plasma processing method
TOKYO ELECTRON LTD1 citations48