Inventor
AOTO TADASHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “AOTO TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6899786B2May 31, 2005
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
TOKYO ELECTRON LTD52 citations95
US10153138B2Dec 11, 2018
Plasma etching apparatus
TOKYO ELECTRON LTD7 citations83
US7481903B2Jan 27, 2009
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism
TOKYO ELECTRON LTD11 citations83
US9412635B2Aug 9, 2016
Electrostatic chuck device
TOKYO ELECTRON LTD4 citations72
US9589823B2Mar 7, 2017
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD4 citations69
US7815492B2Oct 19, 2010
Surface treatment method
TOKYO ELECTRON LTD0 citations49
US8343372B2Jan 1, 2013
Surface processing method for mounting stage
TOKYO ELECTRON LTD0 citations39