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Inventor
TIEMEYER TIMOTHY R
US
5 patents
⚠️ This page may combine multiple inventors who share the name “TIEMEYER TIMOTHY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US7505125B2
Mar 17, 2009
System and method for signal processing for a workpiece surface inspection system
KLA TENCOR CORP
26 citations
93
US9103800B2
Aug 11, 2015
System with multiple scattered light collectors
KLA TENCOR CORP
2 citations
72
KLA TENCOR TECH CORP
1 patent
US7286218B2
Oct 23, 2007
System and method for inspecting a workpiece surface using surface structure spatial frequencies
KLA TENCOR TECH CORP
49 citations
91
ADE CORP
1 patent
US7280200B2
Oct 9, 2007
Detection of a wafer edge using collimated light
ADE CORP
25 citations
85
BILLS RICHARD EARL
1 patent
US8497984B2
Jul 30, 2013
System and method for inspection of a workpiece surface using multiple scattered light collectors
BILLS RICHARD EARL
1 citations
59