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Inventor
ABE TOSHIJI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “ABE TOSHIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ABE TOSHIJI
1 patent
US8267041B2
Sep 18, 2012
Plasma treating apparatus
ABE TOSHIJI
13 citations
77
TOKYO ELECTRON LTD
1 patent
US9851149B2
Dec 26, 2017
Magnetic annealing apparatus and magnetic annealing method
TOKYO ELECTRON LTD
4 citations
66