Inventor
LIU YU-LUN
TW20 patents
⚠️ This page may combine multiple inventors who share the name “LIU YU-LUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10515953B2Dec 24, 2019
Method and structure for gap filling improvement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9793268B2Oct 17, 2017
Method and structure for gap filling improvement
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9543161B1Jan 10, 2017
Method of planarizating film
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9466528B2Oct 11, 2016
Method of making a structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8906595B2Dec 9, 2014
Method for improving resist pattern peeling
TAIWAN SEMICONDUCTOR MFG52 citations95
US9026957B2May 5, 2015
Method of defining an intensity selective exposure photomask
TAIWAN SEMICONDUCTOR MFG1 citations62
US9274414B2Mar 1, 2016
Method for making a lithography mask
TAIWAN SEMICONDUCTOR MFG1 citations50