Inventor

KLAVER RENATUS GERARDUS

NL5 patents

⚠️ This page may combine multiple inventors who share the name “KLAVER RENATUS GERARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7636165B2Dec 22, 2009

Displacement measurement systems lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV104 citations96

STICHTING TECH WETENSCHAPP

1 patent

US6577400B1Jun 10, 2003

Interferometer

STICHTING TECH WETENSCHAPP14 citations80

KLAVER RENATUS GERARDUS

1 patent

US8390820B2Mar 5, 2013

Displacement measurement system having a prism, for displacement measurement between two or more gratings

KLAVER RENATUS GERARDUS4 citations56

EUSSEN EMIEL JOZEF MELANIE

1 patent

US8614783B2Dec 24, 2013

Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system

EUSSEN EMIEL JOZEF MELANIE2 citations54

VAN DEN BRINK MARINUS AART

1 patent

US8248583B2Aug 21, 2012

Lithographic apparatus and calibration method

VAN DEN BRINK MARINUS AART1 citations48