Inventor
KATO TAKEHIRO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KATO TAKEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DENSO CORP
4 patentsUS12057498B2Aug 6, 2024
Silicon carbide semiconductor device and method for manufacturing same
DENSO CORP1 citations62
US10923395B2Feb 16, 2021
Semiconductor device and manufacturing method of semiconductor device
DENSO CORP0 citations62
US12342590B2Jun 24, 2025
Semiconductor device
DENSO CORP0 citations61
US12211902B2Jan 28, 2025
Silicon carbide semiconductor device and method for manufacturing the same
DENSO CORP0 citations50
TOKYO ELECTRON LTD
3 patentsUS7883579B2Feb 8, 2011
Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus
TOKYO ELECTRON LTD8 citations77
US10699935B2Jun 30, 2020
Semiconductor manufacturing device and processing method
TOKYO ELECTRON LTD1 citations62
US12562344B2Feb 24, 2026
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations44