Inventor
LIAO CHIH-TENG
TW66 patents
⚠️ This page may combine multiple inventors who share the name “LIAO CHIH-TENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
49 patentsUS9812363B1Nov 7, 2017
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD237 citations99
US10170555B1Jan 1, 2019
Intermetallic doping film with diffusion in source/drain
TAIWAN SEMICONDUCTOR MFG CO LTD19 citations94
US11075279B2Jul 27, 2021
Metal gate and contact plug design and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10522408B2Dec 31, 2019
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10510875B2Dec 17, 2019
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10163715B2Dec 25, 2018
FinFET device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10121873B2Nov 6, 2018
Metal gate and contact plug design and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10679950B2Jun 9, 2020
Methods of forming recesses in substrates by etching dummy Fins
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10297555B2May 21, 2019
Integrated circuit structure having crown-shaped semiconductor strips and recesses in the substrate from etched dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations83
US11282944B2Mar 22, 2022
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations81
US11545562B2Jan 3, 2023
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11222805B2Jan 11, 2022
Etching apparatus and methods of cleaning thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11171003B2Nov 9, 2021
Doping through diffusion and epitaxy profile shaping
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10910223B2Feb 2, 2021
Doping through diffusion and epitaxy profile shaping
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11621263B2Apr 4, 2023
Semiconductor device with short-resistant capacitor plate
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11600713B2Mar 7, 2023
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12165851B2Dec 10, 2024
Plasma processing method for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11837603B2Dec 5, 2023
Extended side contacts for transistors and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US12424568B2Sep 23, 2025
Method for forming recesses in a substrate by etching dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12125748B2Oct 22, 2024
Contact plug
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080582B2Sep 3, 2024
Etching apparatus and methods of cleaning thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12002855B2Jun 4, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11798846B2Oct 24, 2023
Contact plug
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11522050B2Dec 6, 2022
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11488912B2Nov 1, 2022
Method for forming recesses in a substrate by etching dummy fins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12563828B2Feb 24, 2026
Fin height and STI depth for performance improvement in semiconductor devices having high-mobility p-channel transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12356710B2Jul 8, 2025
Fin height and STI depth for performance improvement in semiconductor devices having high-mobility p-channel transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12315864B2May 27, 2025
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12300741B2May 13, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12283623B2Apr 22, 2025
Semiconductor structure and method for manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12183579B2Dec 31, 2024
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12159807B2Dec 3, 2024
Method of manufacturing semiconductor devices and semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12125707B2Oct 22, 2024
Fin field-effect transistor device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12015085B2Jun 18, 2024
Method of manufacturing a semiconductor device including etching polysilicon
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11935941B2Mar 19, 2024
Semiconductor structure and method for manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11830937B2Nov 28, 2023
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11646232B2May 9, 2023
Method of manufacturing semiconductor devices and semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11532481B2Dec 20, 2022
Fin field-effect transistor device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11430893B2Aug 30, 2022
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12453168B2Oct 21, 2025
Semiconductor device with short-resistant capacitor plate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12243929B2Mar 4, 2025
Forming a dummy gate structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12165936B2Dec 10, 2024
End point control in etching processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12433018B2Sep 30, 2025
Extended side contacts for transistors and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12362238B2Jul 15, 2025
Metal gate process and related structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11705375B2Jul 18, 2023
Etching apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12074074B2Aug 27, 2024
Method and system for processing wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12165873B2Dec 10, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11955430B2Apr 9, 2024
Method of manufacturing semiconductor device and semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11824103B2Nov 21, 2023
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
WANG YAO-CHIN
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