Inventor

YOSHIDA Yuiko

JP2 patents

Patents

2 patents

US9328261B2May 3, 2016

Polishing agent, polishing method, and manufacturing method of semiconductor integrated circuit device

ASAHI GLASS CO LTD0 citations40

US9593261B2Mar 14, 2017

Polishing agent, polishing method, and liquid additive for polishing

ASAHI GLASS CO LTD0 citations35