Inventor
LYONS JOSEPH H
US17 patents
⚠️ This page may combine multiple inventors who share the name “LYONS JOSEPH H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
12 patentsUS6633050B1Oct 14, 2003
Virtual gauging system for use in lithographic processing
ASML HOLDING NV16 citations92
US7940374B2May 10, 2011
Parallel process focus compensation
ASML HOLDING NV7 citations83
US7549321B2Jun 23, 2009
Pressure sensor
ASML HOLDING NV13 citations82
US7472580B2Jan 6, 2009
Pressure sensor
ASML HOLDING NV16 citations82
US7134321B2Nov 14, 2006
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
ASML HOLDING NV15 citations82
US6885429B2Apr 26, 2005
System and method for automated focus measuring of a lithography tool
ASML HOLDING NV13 citations79
US6984836B2Jan 10, 2006
System and method for monitoring the topography of a wafer surface during lithographic processing
ASML HOLDING NV5 citations73
US6979833B2Dec 27, 2005
System for monitoring the topography of a wafer surface during lithographic processing
ASML HOLDING NV4 citations73
US7021121B2Apr 4, 2006
Gas gauge proximity sensor with a modulated gas flow
ASML HOLDING NV7 citations72
US7081948B2Jul 25, 2006
System for automated focus measuring of a lithography tool
ASML HOLDING NV2 citations58
USRE42650EAug 30, 2011
Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
ASML HOLDING NV0 citations51
US7049618B2May 23, 2006
Virtual gauging method for use in lithographic processing
ASML HOLDING NV0 citations51