Inventor

MASUMOTO KEIKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MASUMOTO KEIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIST

2 patents

US10329689B2Jun 25, 2019

Silicon carbide epitaxial wafer and process for producing same

AIST1 citations51

US10879359B2Dec 29, 2020

Silicon carbide epitaxial wafer having a thick silicon carbide layer with small wrapage and manufacturing method thereof

AIST0 citations49

NAT INST ADVANCED IND SCIENCE & TECH

1 patent

US9587326B2Mar 7, 2017

Silicon carbide epitaxial wafer, method for manufacturing silicon carbide epitaxial wafer, device for manufacturing silicon carbide epitaxial wafer, and silicon carbide semiconductor element

NAT INST ADVANCED IND SCIENCE & TECH0 citations47