Inventor
HSIEH YI-TSANG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “HSIEH YI-TSANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS10510598B2Dec 17, 2019
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US12165851B2Dec 10, 2024
Plasma processing method for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11532515B2Dec 20, 2022
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12444580B2Oct 14, 2025
Plasma processing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10804149B2Oct 13, 2020
Self-aligned spacers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12334314B2Jun 17, 2025
Dry etcher uniformity control by tuning edge zone plasma sheath
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US12142494B2Nov 12, 2024
Small gas flow monitoring of dry etcher by OES signal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46