Inventor
CHOE JAE-MYUNG
KR4 patents
Patents
4 patentsUS10790168B2Sep 29, 2020
Plasma treatment apparatus and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US10128112B2Nov 13, 2018
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations50
US11263368B2Mar 1, 2022
Computing system for gas flow simulation, and simulation method
SAMSUNG ELECTRONICS CO LTD0 citations47
US11182518B2Nov 23, 2021
Apparatus and method for designing and manufacturing showerhead
SAMSUNG ELECTRONICS CO LTD0 citations44