Inventor
MUKHERJEE TAMAL
US9 patents
⚠️ This page may combine multiple inventors who share the name “MUKHERJEE TAMAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS10763083B2Sep 1, 2020
High energy atomic layer etching
LAM RES CORP15 citations85
US11935758B2Mar 19, 2024
Atomic layer etching for subtractive metal etch
LAM RES CORP2 citations71
US11450513B2Sep 20, 2022
Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials
LAM RES CORP3 citations71
US12080562B2Sep 3, 2024
Atomic layer etch and ion beam etch patterning
LAM RES CORP1 citations62
US12417902B2Sep 16, 2025
Method for cleaning a chamber
LAM RES CORP0 citations61
US12266542B2Apr 1, 2025
Atomic layer etching for subtractive metal etch
LAM RES CORP0 citations61
US12400842B2Aug 26, 2025
Method of cleaning chamber components with metal etch residues
LAM RES CORP0 citations59
US12256645B2Mar 18, 2025
Chemical etch nonvolatile materials for MRAM patterning
LAM RES CORP0 citations47