Inventor
PETERSON DAVID HART
US5 patents
Patents
5 patentsUS12111581B2Oct 8, 2024
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV2 citations67
US12529967B2Jan 20, 2026
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV0 citations57
US11422289B2Aug 23, 2022
Anti-reflection coating
ASML HOLDING NV0 citations56
US11270906B2Mar 8, 2022
Burls with altered surface topography for holding an object in lithography applications
ASML HOLDING NV1 citations56
US11887881B2Jan 30, 2024
Lithographic apparatus, substrate table, and non-uniform coating method
ASML HOLDING NV0 citations54