Inventor

LEWIS RICHARD BRYAN

US2 patents

Patents

2 patents

US11270906B2Mar 8, 2022

Burls with altered surface topography for holding an object in lithography applications

ASML HOLDING NV1 citations56

US11887881B2Jan 30, 2024

Lithographic apparatus, substrate table, and non-uniform coating method

ASML HOLDING NV0 citations54