Inventor
LEIGHTON JAMIE STUART
US7 patents
⚠️ This page may combine multiple inventors who share the name “LEIGHTON JAMIE STUART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9381613B2Jul 5, 2016
Reinforcement ring for carrier head
APPLIED MATERIALS INC11 citations82
US11911869B2Feb 27, 2024
Chemical mechanical polishing system with platen temperature control
APPLIED MATERIALS INC0 citations61
US12539577B2Feb 3, 2026
System and method for detecting a membrane failure in a chemical mechanical polishing system
APPLIED MATERIALS INC0 citations51
US11850700B2Dec 26, 2023
Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems
APPLIED MATERIALS INC0 citations50
US12454036B2Oct 28, 2025
Substrate handling systems and methods for CMP processing
APPLIED MATERIALS INC0 citations40
US12036635B2Jul 16, 2024
Methods of detecting non-conforming substrate processing events during chemical mechanical polishing
APPLIED MATERIALS INC0 citations37