Inventor

KAMIMURA FUMIHIRO

JP11 patents

⚠️ This page may combine multiple inventors who share the name “KAMIMURA FUMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

8 patents

US11712710B2Aug 1, 2023

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD3 citations72

US12362202B2Jul 15, 2025

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations60

US11869777B2Jan 9, 2024

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD1 citations60

US9415356B1Aug 16, 2016

Chemical-liquid mixing method and chemical-liquid mixing apparatus

TOKYO ELECTRON LTD0 citations51

US9339775B2May 17, 2016

Chemical-liquid mixing method and chemical-liquid mixing apparatus

TOKYO ELECTRON LTD0 citations51

US12525469B2Jan 13, 2026

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations50

US10811266B2Oct 20, 2020

Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program

TOKYO ELECTRON LTD0 citations39

US9627192B2Apr 18, 2017

Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program

TOKYO ELECTRON LTD0 citations36

TANAKA HIROSHI

2 patents

US8475668B2Jul 2, 2013

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein

TANAKA HIROSHI6 citations72

US9099502B2Aug 4, 2015

Chemical-liquid mixing method and chemical-liquid mixing apparatus

TANAKA HIROSHI1 citations51

MINAMI TERUOMI

1 patent

US8303723B2Nov 6, 2012

Liquid processing apparatus, liquid processing method, and storage medium

MINAMI TERUOMI1 citations48