Inventor
MINAMI TERUOMI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI TERUOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS6029371AFeb 29, 2000
Drying treatment method and apparatus
TOKYO ELECTRON LTD107 citations97
US5671544ASep 30, 1997
Substrate drying apparatus and substrate drying method
TOKYO ELECTRON LTD56 citations96
US5575079ANov 19, 1996
Substrate drying apparatus and substrate drying method
TOKYO ELECTRON LTD48 citations96
US8371318B2Feb 12, 2013
Liquid processing apparatus, liquid processing method, and storage medium
TOKYO ELECTRON LTD2 citations63
US10026629B2Jul 17, 2018
Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program
TOKYO ELECTRON LTD2 citations62
US7669472B2Mar 2, 2010
Liquid level detector and liquid processing system provided with the same
TOKYO ELECTRON LTD3 citations62
US11201050B2Dec 14, 2021
Substrate processing method, recording medium and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US10916440B2Feb 9, 2021
Process and apparatus for processing a nitride structure without silica deposition
TOKYO ELECTRON LTD0 citations61
US10515820B2Dec 24, 2019
Process and apparatus for processing a nitride structure without silica deposition
TOKYO ELECTRON LTD1 citations61
US12362202B2Jul 15, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11869777B2Jan 9, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations60
US12525469B2Jan 13, 2026
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US9321085B2Apr 26, 2016
Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
MINAMI TERUOMI
4 patentsUS8303723B2Nov 6, 2012
Liquid processing apparatus, liquid processing method, and storage medium
MINAMI TERUOMI1 citations48
US8308870B2Nov 13, 2012
Cleaning apparatus, cleaning method and recording medium
MINAMI TERUOMI0 citations38
US8906165B2Dec 9, 2014
Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus
MINAMI TERUOMI0 citations37
US8545640B2Oct 1, 2013
Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus
MINAMI TERUOMI0 citations37