Inventor
CHANG FENG-JU
US13 patents
⚠️ This page may combine multiple inventors who share the name “CHANG FENG-JU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11048161B2Jun 29, 2021
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10360339B2Jul 23, 2019
Method for integrated circuit manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9026955B1May 5, 2015
Methodology for pattern correction
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US10747938B2Aug 18, 2020
Method for integrated circuit manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10527928B2Jan 7, 2020
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51