Inventor
NAKAZAWA KIWAO
JP6 patents
Patents
6 patentsUS4103998AAug 1, 1978
Automatic alignment apparatus
NIPPON KOGAKU KK92 citations95
US4531060AJul 23, 1985
Positioning method
NIPPON KOGAKU KK112 citations92
US4385838AMay 31, 1983
Alignment device
NIPPON KOGAKU KK34 citations92
US4112309ASep 5, 1978
Apparatus for measuring the line width of a pattern
NIPPON KOGAKU KK47 citations92
US4423959AJan 3, 1984
Positioning apparatus
NIPPON KOGAKU KK40 citations89
US4266876AMay 12, 1981
Automatic alignment apparatus
NIPPON KOGAKU KK11 citations73