Inventor

GOTODA KAZUNORI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “GOTODA KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOMOE SHOKAI CO LTD

1 patent

US6900439B2May 31, 2005

Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus

TOMOE SHOKAI CO LTD21 citations86

JAPAN ATOMIC ENERGY RES INST

1 patent

US5672325ASep 30, 1997

Method for the oxidation treatment of decaborane gas

JAPAN ATOMIC ENERGY RES INST5 citations51