Inventor
ODAKA MASAKAZU
JP8 patents
Patents
8 patentsUS5427824AJun 27, 1995
CVD apparatus
SEMICONDUCTOR ENERGY LAB352 citations99
US5379139AJan 3, 1995
Liquid crystal device and method for manufacturing same with spacers formed by photolithography
SEMICONDUCTOR ENERGY LAB477 citations98
US6493057B1Dec 10, 2002
Liquid crystal device and method for manufacturing same with spacers formed by photolithography
SEMICONDUCTOR ENERGY LAB14 citations92
US6013338AJan 11, 2000
CVD apparatus
SEMICONDUCTOR ENERGY LAB18 citations92
US5855970AJan 5, 1999
Method of forming a film on a substrate
SEMICONDUCTOR ENERGY LAB21 citations92
US5629245AMay 13, 1997
Method for forming a multi-layer planarization structure
SEMICONDUCTOR ENERGY LAB19 citations92
US6520189B1Feb 18, 2003
CVD apparatus
SEMICONDUCTOR ENERGY LAB8 citations74
US6853431B2Feb 8, 2005
Liquid crystal device and method for manufacturing same with spacers formed by photolithography
SEMICONDUCTOR ENERGY LAB0 citations51