Inventor
HATTANGADY SUNIL V
US15 patents
Patents
15 patentsUS6251761B1Jun 26, 2001
Process for polycrystalline silicon gates and high-K dielectric compatibility
TEXAS INSTRUMENTS INC85 citations98
US6110842AAug 29, 2000
Method of forming multiple gate oxide thicknesses using high density plasma nitridation
TEXAS INSTRUMENTS INC132 citations98
US5989962ANov 23, 1999
Semiconductor device having dual gate and method of formation
TEXAS INSTRUMENTS INC56 citations96
US6399445B1Jun 4, 2002
Fabrication technique for controlled incorporation of nitrogen in gate dielectric
TEXAS INSTRUMENTS INC51 citations92
US6335238B1Jan 1, 2002
Integrated dielectric and method
TEXAS INSTRUMENTS INC32 citations92
US6331492B2Dec 18, 2001
Nitridation for split gate multiple voltage devices
TEXAS INSTRUMENTS INC48 citations92
US6277681B1Aug 21, 2001
Process to produce ultrathin crystalline silicon nitride on Si(111) for advanced gate dielectrics
TEXAS INSTRUMENTS INC18 citations92
US6268296B1Jul 31, 2001
Low temperature process for multiple voltage devices
TEXAS INSTRUMENTS INC48 citations92
US6261973B1Jul 17, 2001
Remote plasma nitridation to allow selectively etching of oxide
TEXAS INSTRUMENTS INC41 citations92
US6140024AOct 31, 2000
Remote plasma nitridation for contact etch stop
TEXAS INSTRUMENTS INC50 citations92
US5970345AOct 19, 1999
Method of forming an integrated circuit having both low voltage and high voltage MOS transistors
TEXAS INSTRUMENTS INC38 citations92
US6716695B1Apr 6, 2004
Semiconductor with a nitrided silicon gate oxide and method
TEXAS INSTRUMENTS INC35 citations91
US6323114B1Nov 27, 2001
Stacked/composite gate dielectric which incorporates nitrogen at an interface
TEXAS INSTRUMENTS INC38 citations86
US6956267B2Oct 18, 2005
Semiconductor with a nitrided silicon gate oxide and method
TEXAS INSTRUMENTS INC14 citations82
US6420729B2Jul 16, 2002
Process to produce ultrathin crystalline silicon nitride on Si (111) for advanced gate dielectrics
TEXAS INSTRUMENTS INC6 citations74