Inventor

WAELTI MARC

US2 patents

Patents

2 patents

US6989921B2Jan 24, 2006

Magnetically actuated micro-electro-mechanical apparatus and method of manufacture

CORNING INC77 citations96

US6912078B2Jun 28, 2005

Electrostatically actuated micro-electro-mechanical devices and method of manufacture

CORNING INC77 citations92