Inventor
RASNAKE JASEAN
US4 patents
Patents
4 patentsUS7290321B2Nov 6, 2007
Alignment apparatus and method for aligning stacked devices
SHIPLEY CO LLC19 citations91
US7086134B2Aug 8, 2006
Alignment apparatus and method for aligning stacked devices
SHIPLEY CO LLC17 citations91
US6964804B2Nov 15, 2005
Micromachined structures made by combined wet and dry etching
SHIPLEY CO LLC6 citations72
US6885786B2Apr 26, 2005
Combined wet and dry etching process for micromachining of crystalline materials
SHIPLEY CO LLC2 citations60