Inventor
NAUMOSKI GOCE
NL4 patents
Patents
4 patentsUS7715019B2May 11, 2010
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV14 citations82
US7532331B2May 12, 2009
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV10 citations82
US7916927B2Mar 29, 2011
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV11 citations77
US7630087B2Dec 8, 2009
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV2 citations60