Inventor
SHERRARD MICHAEL
US5 patents
⚠️ This page may combine multiple inventors who share the name “SHERRARD MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6328814B1Dec 11, 2001
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC60 citations95
US7718011B2May 18, 2010
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC17 citations91
US7252098B2Aug 7, 2007
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC26 citations91
US6746544B2Jun 8, 2004
Apparatus for cleaning and drying substrates
APPLIED MATERIALS INC32 citations91