Inventor
YOKOO HIDEKAZU
JP3 patents
Patents
3 patentsUS7847271B2Dec 7, 2010
Ion implanting apparatus
ULVAC INC0 citations46
US7777206B2Aug 17, 2010
Ion implantation device control method, control system thereof, control program thereof, and ion implantation device
ULVAC INC1 citations40
US12014946B2Jun 18, 2024
Electrostatic chuck, vacuum processing apparatus, and substrate processing method
ULVAC INC0 citations38