Inventor
SHIBATA YUGO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA YUGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
10 patentsUS8031328B2Oct 4, 2011
Positioning apparatus
CANON KK28 citations92
US7330093B2Feb 12, 2008
Alignment apparatus, exposure apparatus, and device manufacturing method
CANON KK10 citations83
US7282874B2Oct 16, 2007
Alignment apparatus, exposure apparatus, and device manufacturing method
CANON KK8 citations73
US7193493B2Mar 20, 2007
Alignment apparatus, exposure apparatus, and device manufacturing method
CANON KK8 citations72
US7932646B2Apr 26, 2011
Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield
CANON KK4 citations61
US7880864B2Feb 1, 2011
Stage apparatus, exposure apparatus, and device manufacturing method
CANON KK2 citations61
US7375346B2May 20, 2008
Positioning device and method of initializing a positioning device
CANON KK2 citations61
US7157722B2Jan 2, 2007
Positioning device and method of initializing a positioning device
CANON KK2 citations61
US9791018B2Oct 17, 2017
Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device
CANON KK0 citations50
US7804207B2Sep 28, 2010
Positioning apparatus, exposure apparatus, and device manufacturing method using repulsion force generation
CANON KK0 citations40