Inventor

CHENG LEGAL REPRESENTATIVE HELEN

US2 patents

Patents

2 patents

US8146902B2Apr 3, 2012

Hybrid composite wafer carrier for wet clean equipment

CHENG WING LAU3 citations54

US8292697B2Oct 23, 2012

Method for manufacturing a hybrid composite wafer carrier for wet clean equipment

CHENG WING LAU0 citations43