Inventor

GOTOH YASUHITO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “GOTOH YASUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV KYOTO

1 patent

US7935944B2May 3, 2011

Ion beam irradiating apparatus, and method of producing semiconductor device

UNIV KYOTO2 citations59

NICOLAESCU DAN

1 patent

US8461548B2Jun 11, 2013

Ion beam irradiation device and method for suppressing ion beam divergence

NICOLAESCU DAN2 citations57