Inventor

EDELBERG ERIK A

US9 patents

⚠️ This page may combine multiple inventors who share the name “EDELBERG ERIK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents

US8425682B2Apr 23, 2013

High strip rate downstream chamber

LAM RES CORP378 citations97

US7977390B2Jul 12, 2011

Method for plasma etching performance enhancement

LAM RES CORP29 citations92

US7547636B2Jun 16, 2009

Pulsed ultra-high aspect ratio dielectric etch

LAM RES CORP22 citations92

US7682986B2Mar 23, 2010

Ultra-high aspect ratio dielectric etch

LAM RES CORP13 citations83

US7083903B2Aug 1, 2006

Methods of etching photoresist on substrates

LAM RES CORP13 citations79

WANG ING-YANN

1 patent

US8298336B2Oct 30, 2012

High strip rate downstream chamber

WANG ING-YANN384 citations95

EDELBERG ERIK A

1 patent

US8475673B2Jul 2, 2013

Method and apparatus for high aspect ratio dielectric etch

EDELBERG ERIK A22 citations88

CHI KYEONG-KOO

1 patent

US8906194B2Dec 9, 2014

Ultra-high aspect ratio dielectric etch

CHI KYEONG-KOO1 citations50

JI BING

1 patent

US8741165B2Jun 3, 2014

Reducing twisting in ultra-high aspect ratio dielectric etch

JI BING0 citations49