Inventor
DELARIOS JOHN M
US11 patents
⚠️ This page may combine multiple inventors who share the name “DELARIOS JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS6334229B1Jan 1, 2002
Apparatus for cleaning edges of contaminated substrates
LAM RES CORP63 citations95
US6770151B1Aug 3, 2004
Drying a substrate using a combination of substrate processing technologies
LAM RES CORP55 citations92
US6200201B1Mar 13, 2001
Cleaning/buffer apparatus for use in a wafer processing device
LAM RES CORP17 citations79
US7967916B2Jun 28, 2011
Method of preventing pattern collapse during rinsing and drying
LAM RES CORP1 citations51
FREER ERIK M
4 patentsUS8316866B2Nov 27, 2012
Method and apparatus for cleaning a semiconductor substrate
FREER ERIK M6 citations84
US8522801B2Sep 3, 2013
Method and apparatus for cleaning a semiconductor substrate
FREER ERIK M6 citations73
US8608859B2Dec 17, 2013
Method for removing contamination from a substrate and for making a cleaning solution
FREER ERIK M2 citations62
US8388762B2Mar 5, 2013
Substrate cleaning technique employing multi-phase solution
FREER ERIK M2 citations62