Inventor

SYTA{HACEK OVER (R)} PETR

CZ3 patents

Patents

3 patents

US9362086B2Jun 7, 2016

In-column detector for particle-optical column

FEI CO7 citations77

US9490100B2Nov 8, 2016

Method of using a compound particle-optical lens

FEI CO6 citations67

US9053899B2Jun 9, 2015

Method for imaging a sample in a charged particle apparatus

FEI CO1 citations44