Inventor
PETRO BENJAMIN
US8 patents
⚠️ This page may combine multiple inventors who share the name “PETRO BENJAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
6 patentsUS10418248B2Sep 17, 2019
Method of polishing group III-V materials
CABOT MICROELECTRONICS CORP4 citations71
US9834704B2Dec 5, 2017
Cobalt dishing control agents
CABOT MICROELECTRONICS CORP3 citations71
US9688885B2Jun 27, 2017
Cobalt polishing accelerators
CABOT MICROELECTRONICS CORP2 citations69
US10124464B2Nov 13, 2018
Corrosion inhibitors and related compositions and methods
CABOT MICROELECTRONICS CORP6 citations68
US9850403B2Dec 26, 2017
Cobalt polishing accelerators
CABOT MICROELECTRONICS CORP0 citations48
US9944828B2Apr 17, 2018
Slurry for chemical mechanical polishing of cobalt
CABOT MICROELECTRONICS CORP0 citations46