Inventor
FUJIO KAZUHIKO
JP9 patents
Patents
9 patentsUS9448014B2Sep 20, 2016
Channel member, and heat exchanger, semiconductor unit, and semiconductor manufacturing apparatus including the same
KYOCERA CORP5 citations66
US10627173B2Apr 21, 2020
Flow path member, and heat exchanger and semiconductor manufacturing apparatus using same
KYOCERA CORP1 citations60
US12145891B2Nov 19, 2024
Ceramic structural body
KYOCERA CORP0 citations58
US11961747B2Apr 16, 2024
Heater and heater system
KYOCERA CORP0 citations50
US12516416B2Jan 6, 2026
Flow path member
KYOCERA CORP0 citations49
US10566264B2Feb 18, 2020
Flow path member and semiconductor module
KYOCERA CORP0 citations49
US10103047B2Oct 16, 2018
Flow path member, heat exchanger including the flow path member, and semiconductor manufacturing apparatus including the flow path member
KYOCERA CORP0 citations49
US9953898B2Apr 24, 2018
Flow channel member, and heat exchanger and semiconductor module each using same
KYOCERA CORP0 citations49
US10697707B2Jun 30, 2020
Heat exchange member and heat exchanger
KYOCERA CORP0 citations39