Inventor
MOORING BENJAMIN W
US12 patents
⚠️ This page may combine multiple inventors who share the name “MOORING BENJAMIN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS6629053B1Sep 30, 2003
Method and apparatus for determining substrate offset using optimization techniques
LAM RES CORP85 citations97
US6095741AAug 1, 2000
Dual sided slot valve and method for implementing the same
LAM RES CORP77 citations95
US6502054B1Dec 31, 2002
Method of and apparatus for dynamic alignment of substrates
LAM RES CORP93 citations92
US6267545B1Jul 31, 2001
Semiconductor processing platform architecture having processing module isolation capabilities
LAM RES CORP28 citations92
US10256124B2Apr 9, 2019
Method and system related to semiconductor processing equipment
LAM RES CORP10 citations83
US10790237B2Sep 29, 2020
Fiducial-filtering automatic wafer centering process and associated system
LAM RES CORP4 citations72
US10796940B2Oct 6, 2020
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP5 citations69
US10559483B2Feb 11, 2020
Platform architecture to improve system productivity
LAM RES CORP1 citations59
US7164282B1Jan 16, 2007
Methods and apparatus for determining an average electrical response to a conductive layer on a substrate
LAM RES CORP0 citations40