Inventor
GENETTI DAMON TYRONE
US13 patents
Patents
13 patentsUS9881820B2Jan 30, 2018
Front opening ring pod
LAM RES CORP124 citations97
US10124492B2Nov 13, 2018
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP25 citations93
US10062599B2Aug 28, 2018
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP30 citations93
US10062590B2Aug 28, 2018
Front opening ring pod
LAM RES CORP23 citations93
US10062589B2Aug 28, 2018
Front opening ring pod
LAM RES CORP20 citations93
US10541168B2Jan 21, 2020
Edge ring centering method using ring dynamic alignment data
LAM RES CORP9 citations82
US10790237B2Sep 29, 2020
Fiducial-filtering automatic wafer centering process and associated system
LAM RES CORP4 citations72
US10427307B2Oct 1, 2019
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP3 citations72
US10304717B2May 28, 2019
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP2 citations72
US12142466B2Nov 12, 2024
Automated transfer of edge ring requiring rotational alignment
LAM RES CORP0 citations53
US10770339B2Sep 8, 2020
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP0 citations51
US10190865B2Jan 29, 2019
Verifying end effector flatness using electrical continuity
LAM RES CORP0 citations47
US12575365B2Mar 10, 2026
Edge ring transfer with automated rotational pre-alignment
LAM RES CORP0 citations46