Inventor
DAI YAO-FONG
TW5 patents
Patents
5 patentsUS10450655B2Oct 22, 2019
CVD apparatus with multi-zone thickness control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US9953888B1Apr 24, 2018
Electromagnetic detection device and semiconductor manufacturing system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US10982327B2Apr 20, 2021
CVD apparatus with multi-zone thickness control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10975473B2Apr 13, 2021
CVD apparatus with multi-zone thickness control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12286706B2Apr 29, 2025
Structures and methods for processing a semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46