Inventor
Chou Yin-Tun
TW13 patents
Patents
13 patentsUS9997336B2Jun 12, 2018
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12518980B2Jan 6, 2026
Semiconductor substrate bonding tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11862482B2Jan 2, 2024
Semiconductor substrate bonding tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12142514B2Nov 12, 2024
Clamp ring and method of using clamp ring
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12020994B2Jun 25, 2024
Power alarm and fire loading risk reduction for a deposition tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12002699B2Jun 4, 2024
Wafer pod transfer assembly
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11600506B2Mar 7, 2023
Wafer pod transfer assembly
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11955317B2Apr 9, 2024
Radio frequency match strap assembly
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12466727B2Nov 11, 2025
Extended acid etch for oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11655146B2May 23, 2023
Extended acid etch for oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10957516B2Mar 23, 2021
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11211354B2Dec 28, 2021
Systems and methods for semi-flexible eutectic bonder piece arranegments
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12286706B2Apr 29, 2025
Structures and methods for processing a semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46