Inventor

OKUBO TSUNEO

5 patents

⚠️ This page may combine multiple inventors who share the name “OKUBO TSUNEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIPPON TELEGRAPH & TELEPHONE

2 patents

US4443703AApr 17, 1984

Method and apparatus of deflection calibration for a charged particle beam exposure apparatus

NIPPON TELEGRAPH & TELEPHONE23 citations81

US4336597AJun 22, 1982

Method and system for measuring the diameter of an electron beam

NIPPON TELEGRAPH & TELEPHONE20 citations80

HITACHI LTD

2 patents

US4489241ADec 18, 1984

Exposure method with electron beam exposure apparatus

HITACHI LTD12 citations72

US4286154AAug 25, 1981

Method of detecting a mark by an electron beam and an apparatus therefor

HITACHI LTD10 citations72

OKUBO TSUNEO

1 patent

US3983097ASep 28, 1976

Method of producing high molecular derivatives

OKUBO TSUNEO3 citations51