Inventor
WAUK II MICHAEL T
GB8 patents
⚠️ This page may combine multiple inventors who share the name “WAUK II MICHAEL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5389793AFeb 14, 1995
Apparatus and methods for ion implantation
APPLIED MATERIALS INC90 citations94
US4733091AMar 22, 1988
Systems and methods for ion implantation of semiconductor wafers
APPLIED MATERIALS INC109 citations94
US4776744AOct 11, 1988
Systems and methods for wafer handling in semiconductor process equipment
APPLIED MATERIALS INC410 citations93
US6093625AJul 25, 2000
Apparatus for and methods of implanting desired chemical species in semiconductor substrates
APPLIED MATERIALS INC70 citations91
US5126576AJun 30, 1992
Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation
APPLIED MATERIALS INC19 citations68