Inventor
BRIGHT NICHOLAS J
GB3 patents
Patents
3 patentsUS4754200AJun 28, 1988
Systems and methods for ion source control in ion implanters
APPLIED MATERIALS INC54 citations94
US4743767AMay 10, 1988
Systems and methods for ion implantation
APPLIED MATERIALS INC78 citations94
US5126576AJun 30, 1992
Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation
APPLIED MATERIALS INC19 citations68