Inventor
KOMODA TSUTOMU
JP10 patents
Patents
10 patentsUS5412209AMay 2, 1995
Electron beam apparatus
HITACHI LTD105 citations95
US4948962AAug 14, 1990
Plasma ion source mass spectrometer
HITACHI LTD67 citations95
US4963735AOct 16, 1990
Plasma source mass spectrometer
HITACHI LTD48 citations92
US4912351AMar 27, 1990
Piezoelectric motor
HITACHI LTD38 citations92
US4193013AMar 11, 1980
Cathode for an electron source and a method of producing the same
HITACHI LTD19 citations82
US4692579ASep 8, 1987
Electron beam lithography apparatus
HITACHI LTD21 citations81
US4829444AMay 9, 1989
Charged particle beam lithography system
HITACHI LTD9 citations73
US4626690ADec 2, 1986
Apparatus for chopping a charged particle beam
HITACHI LTD10 citations73
US4041316AAug 9, 1977
Field emission electron gun with an evaporation source
HITACHI LTD7 citations73
US4153334AMay 8, 1979
Stereoscopic image observing apparatus
HITACHI LTD4 citations62