Inventor

ITSUKI ATSUSHI

JP10 patents

⚠️ This page may combine multiple inventors who share the name “ITSUKI ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI MATERIALS CORP

8 patents

US5696384ADec 9, 1997

Composition for formation of electrode pattern

MITSUBISHI MATERIALS CORP46 citations92

US5767302AJun 16, 1998

High-purity TI complexes, methods for producing the same and BST film-forming liquid compositions

MITSUBISHI MATERIALS CORP24 citations91

US6310228B1Oct 30, 2001

Organic copper compound, liquid mixture containing the compound, and copper thin-film prepared using the solution

MITSUBISHI MATERIALS CORP6 citations73

US6280518B1Aug 28, 2001

Organic titanium compound suitable for MOCVD

MITSUBISHI MATERIALS CORP9 citations71

US7196211B2Mar 27, 2007

Hafnium-containing material for film formation, method for producing the same, and method for producing hafnium-containing thin film using the same

MITSUBISHI MATERIALS CORP7 citations70

US7148367B2Dec 12, 2006

Organometallic compound, its synthesis method, and solution raw material and metal-containing thin film containing the same

MITSUBISHI MATERIALS CORP3 citations61

US6485554B1Nov 26, 2002

Solution raw material for forming composite oxide type dielectric thin film and dielectric thin film

MITSUBISHI MATERIALS CORP5 citations60

US6355097B2Mar 12, 2002

Organic titanium compound suitable for MOCVD

MITSUBISHI MATERIALS CORP3 citations60

KOJUNDO CHEMICAL LABORATORY CO LTD

2 patents

US11613809B2Mar 28, 2023

Solid vaporization/supply system of metal halide for thin film deposition

KOJUNDO CHEMICAL LABORATORY CO LTD0 citations50

US11566326B2Jan 31, 2023

Vaporizable source material container and solid vaporization/supply system using the same

KOJUNDO CHEMICAL LABORATORY CO LTD0 citations50