Inventor · disambiguated record
Jonathan L. Klein
Also filed as: KLEIN JONATHAN L
8 granted patents·1 pending application·478 citations·filing 1995–2008
90Inventor score
Top patents by PatentIndex Score
9 records- 0197US7406761B2Method of manufacturing vibrating micromechanical structuresHONEYWELL INT INC·Filed 2005·Granted Aug 5, 2008·55 cites·9 claims
- 0297US5644177AMicromechanical magnetically actuated devicesWISCONSIN ALUMNI RES FOUND·Filed 1995·Granted Jul 1, 1997·163 cites·30 claims
- 0395US5866281AAlignment method for multi-level deep x-ray lithography utilizing alignment holes and postsWISCONSIN ALUMNI RES FOUND·Filed 1996·Granted Feb 2, 1999·136 cites·25 claims
- 0492US7836574B2Method of manufacturing vibrating micromechanical structuresHONEYWELL INT INC·Filed 2008·Granted Nov 23, 2010·17 cites·3 claims
- 0592US5908719ARadiation mask adapted to be aligned with a photoresist layer and method of making the sameWISCONSIN ALUMNI RES FOUND·Filed 1998·Granted Jun 1, 1999·88 cites·9 claims
- 0672US7516661B2Z offset MEMS deviceHONEYWELL INT INC·Filed 2006·Granted Apr 14, 2009·6 cites·12 claims
- 0750US8453312B2Method of manufacturing vibrating micromechanical structuresJAFRI IJAZ H·Filed 2008·Granted Jun 4, 2013·0 cites·7 claims
- 0847US5679502AMethod and apparatus for micromachining using hard X-raysWISCONSIN ALUMNI RES FOUND·Filed 1995·Granted Oct 21, 1997·13 cites·46 claims
- 0939US2008032501A1Silicon on metal for mems devicesHONEYWELL INT INC·Filed 2006·Application pending·0 cites
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